The application of sheet metal in semiconductor equipment is mainly for manufacturing the equipment's structures and casings, providing good encapsulation, protection, and heat dissipation. Here are some common applications of sheet metal in semiconductor equipment:
- Semiconductor Process Equipment Casings
Sheet metal is used to manufacture the casings and structures of semiconductor process equipment. These equipment include Chemical Vapor Deposition (CVD) machines, Physical Vapor Deposition (PVD) machines, etching machines, sputtering equipment, etc. Sheet metal casings provide excellent protection for the complex electronic components and mechanical structures inside.
- Heat Dissipation Modules
In high-power semiconductor equipment, sheet metal is used in the manufacturing of heat dissipation modules. These modules typically include finned heat sinks and cooling fans, with sheet metal efficiently dissipating heat and maintaining stable operating temperatures.
- Encapsulation and Sealing
Sheet metal is used in the semiconductor encapsulation process to manufacture packaging frames and sealing structures. These packaging components protect semiconductor chips, provide mechanical support and protection, and prevent moisture and contaminants from entering.
- Vacuum Chambers
In certain semiconductor equipment, sheet metal is used to manufacture vacuum chambers, such as ion sputtering equipment, plasma etching equipment, etc. Sheet metal provides high vacuum sealing and corrosion resistance.
- Gas and Liquid Piping
In semiconductor equipment, sheet metal is used to manufacture gas and liquid piping systems, used to direct different gases and liquids to their respective process areas. The sheet metal piping needs to have high-pressure and corrosion-resistant properties.
These are some common applications of sheet metal in semiconductor equipment. Sheet metal plays a vital role in the semiconductor manufacturing industry, providing the necessary structures and functionalities for the manufacturing and operation of semiconductor equipment.